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NIKON Eclipse L300N Microscope for 300mm Wafers and Masks

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Combined with Nikon’s superior CFI60 LU/L optical system and an extraordinary new illumination system, this microscope provides images with greater contrast, high resolving power and darkfield images three times brighter than before.
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Key Features

Epi-fluorescence observation widens inspection range—including 365 nm UV excitation
Diascopic illumination capability and various observation methods such as brightfield, darkfield, simple polarizing and DIC. Epi-fluorescence observation, including 365 nm UV excitation, is also possible (L300N/L300ND/L200ND only).
Highly beneficial in inspection of semiconductor resist residues and organic electroluminescence displays

Motorized mercury fiber illuminator Intensilight for Epi-fluorescence observation
A motorized mercury precentered fiber illuminator is employed.
Lamp centering and focus adjustment are not necessary, even after lamp replacement.
The light source can be placed away from the microscope, reducing heat near the microscope and preventing defocusing.
Variable light intensity and shutter control provide excellent flexibility.
The lamp has an average lifespan of 2000 hours.

Four times brighter than conventional Diascopic observation
The L300ND employs a new light source and advanced optics to provide four times brighter illumination for Diascopic observation.

CFI60 optics offer long working distance and high NA
Nikon’s original CFI60 optics offer both image brightness through high NA and wider sample range and access with long WD.
Provides clear, high-contrast brightfield images by minimizing flare.
The "fly-eye" lens array, which provides uniform illumination throughout the visual field, is employed for darkfield illumination optics, allowing remarkably bright, high-resolution darkfield images.


Specifications
  • Main Body:
    12V-50W halogen lamp light source built in; Power sources for motorized control built in
    Motorized control for nosepiece, Light intensity control, Aperture diaphragm control
  • Focusing Mechanism:
    Cross travel: 29 mm
    Coarse: 12.7 mm per rotation (torque adjustable, refocusing mechanism provided)
    Fine: 0.1 mm per rotation (in 1μm increments)
  • Interface
    USB x 1, RS232C (for Intensilight) x 1
  • Diascopic illuminator
    12V-50W halogen lamp light source built in
    Aperture diaphragm built in
    LWD condenser built in
  • Episcopic Illuminator:
    12V-50W halogen lamp light source built in
    Motorized aperture diaphragm (centerable), Fixed field diaphragm (with focus target)
    Pinhole slider (optional), Four ø25 mm filters (NCB11, ND16, ND4), Polarizer and Analyzer can be mounted
    Observation methods: Brightfield, Darkfield, Simple polarizing, DIC, Epi-fluorescence*
    * L300N/L300ND/L200ND only
  • Nosepiece:
    Motorized universal sextuple nosepiece
    Epi/Dia changeover
  • Eyepiece Tube:
    L2-TT2A Ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30 °) FOV: 22/25; Beamsplit ratio 100:0/20:80
    L2-TTA Ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30 °) FOV: 22/25; Beamsplit ratio 100:0/0:100
    LV-TI3 Trinocular eyepiece tube (erect image) FOV: 22/25; Beamsplit ratio 100:0/0:100
  • Stage:
    L2-S8A 8 x 8 stage, stroke: 205 x 205 mm
    (Diascopic observation range: 150 x 150 mm)
    Coarse/Fine-movement changeover possible
    Fixed-position X-Y fine-movement controls
  • Eyepieces:
    CFI eyepiece lens series
  • Antistatic mechanism
    1000-10 V, within 0.2 sec
  • Objectives:
    CFI LU/L Plan series
  • Weight:
    Approx. 30 kg (Body only)
    Approx. 45 kg (When L2-S8A 8 x 8 stage and L2-TTA eyepiece tube are used)

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