CFI Infinity Optics
With a 60mm parfocal distance and larger objective diameter, the Nikon’s CFI60 optics provide both longer working distances and higher numerical apertures. The results of this remarkable technology are extremely sharp, high contrast images with a minimum of flare.
Motorized Control
Frequently used microscopy procedures such as aperture adjustment, focusing, nosepiece rotation, lamp intensity, and changing optical techniques can now be executed from the conveniently positioned remote controller.
Recipe Control
All settings can be pre-programmed allowing the engineer to pick the optimum setting for the inspection of each substrate or layer, allowing for standardization of inspection routines.
New Nosepiece
Using the same patented encoded nospiece design as the L200, the L200A increases positioning accuracy even further by offering 3 manually centerable nosepiece positions.
DART Compatible
Interfaced with DART software, the L200A not only offers an infinite number of recipes, but offers a sound foundation for building a complete automated inspection system. DART's complete line of Inspection and Review modules offer an inspection package to fit virtually any requirement.
Wafer Loader Compatability
The L200A has been designed to work with the NWL860 series wafer loaders.
Auto Focus
The optional intermediate tube type auto focus uses an infrared LED light source allowing precise focusing. Controls are located on the L200A remote controller eliminating the need for additional control boxes.
Confocal Module
Combined with the superb resolution and high contrast of the L200 series optics, the retrofittable confocal option allows observation of increasingly fine, multilayered LSI patterns.
Super Fine Focus Module
When attached to the focus knob of any Eclipse L200 microscope, the Super Fine Focus Module offers precise focus control when observing samples with a shallow depth of focus. Increasing the fine focus gear ratio by 5 times, it is a perfect addition to the confocal module.
Motorized DIC Option
Recipe programming of optimum observation conditions, including focus positioon, aperture, light intensity, nosepiece rotation, and brightfield/darkfield changeover, eliminates the need to readjust settings for each inspection process.
- Observation Method:
Brightfield, Darkfield, DIC, Simple Polarizing.
- Main Body:
Episcopic Stand with attached Universal Nosepiece - Power Supply built-in.
- Focusing Mechanism:
Stroke: 29mm; Coarse: 12.7mm per rotation (torque adjustable, focusing stop mechanism provided); Fine 0.1mm per rotation (in 1 micrometer increments); Guide: 4-guide (two roller-race, torque adjustable)
- Episcopic Illuminator:
Motorized aperture diaphragm (centerable, pinhole slider incorporated); fixed field diaphragm (with focus target); four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; Polarizer; Analyzer
- Light Source:
100W Halogen - 100W Mercury - 75W Xenon - 150W Metal Halide.
- Eyepiece Tube:
UW Tilting Trinocular Eyepiece Tube (tilt angle 0-30 degrees, erect images); F.O.V.: 25mm; Optical Path Changeover: 2-way (Binocular: Photo 100:0/0:100).
- Nosepiece:
Fixed-Motorized Sextuple Universal Nosepiece (centerable), highly durable.
- Stage:
8 x 8 Stage; Cross Travel: 205 x 205mm, Coarse/line-movement changeover: manual; wafer holders:5-8 inch, Mask Holders 5-6 inch.
- Control:
Front Panel: Nosepiece rotation buttons, Episcopic aperture diaphragm stop buttons, light intensity control knob; Remote Control: LCD panel, magnification changeover, motorized z-axis, episcopic aperture diaphragm stop buttons, light intensity control knob, motorized bright/darkfield changeover key, DIC adjustment knob, option keys .
- Eyepieces:
CFI eyepiece lens series
- Objectives:
CFI LU/L Plan series
- Auto Focus Unit:
Optional (LED).
- Communication:
RS-232C.
- Weight:
Approximately 45 kg (when 8 x 8 Stage and UW Eyepiece Tube are used)
- Compliance:
SEMI S2-0200, S8-0600, CE, UL
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