CFI60 LU/L Infinity Optical System
The L200 series of microscopes incorporate CFI60 LU/L Infinity Optics providing images with excellent clarity, high contrast and a minimum of flare.
Rigid, Stable Design
Using CAE (Computer Aided Engineering) Nikon has dramatically increased the rigidity of the L200 series making them extremely stable and resistant to vibration.
ESD Design
The bodies of these microscopes are finished with an ESD (electrostatic discharge) coating to prevent particles from adhering. The built-in motorized nosepiece uses a shielded center-motor that traps foreign particles inside, preventing them from falling onto the sample.
Tilting Trinocular Eyepiece Tube
The Tilting Trinocular Eyepiece Tube allows continuous adjustment of the tilt angle from 0-30 degrees.
Improved Illumination System
A new illumination system improves signal/background ratio and the sensitivity of these microscopes under darkfield observations to detect minute scratches and surface irregularities within the sample.
Focus Target
The addition of a focus target that easily moves in and out of the optical path allows for easier focusing on bright samples such as bare wafers.
Wafer Loading Compatability
The L200 has been designed to work with the NWL860 series wafer loaders.
Confocal Module
Combined with the superb resolution and high contrast of the L200 series optics, the retrofittable confocal option allows observation of increasingly fine, multilayered LSI patterns.
- Main Body:
Built-in Episcopic Illumination; built-in power sources for motorized control; motorized control for nosepiece; light intensity control; aperture diaphragm control
- Focusing Mechanism:
Cross travel: 29mm; Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism provided); Fine: 0.1mm per rotation (in 1 micrometer increments)
- Episcopic Illuminator:
12V/100W halogen lamp light source built-in; motorized aperture diaphragm (centerable); fixed field diaphragm (with focus target); pinhole slider (optional) can be mounted; four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; polarizer; analyzer
- Nosepiece:
Fixed-motorized Sextuple Universal Nosepiece; slot for DIC attachment provided.
- Eyepiece Tube:
L2TT Ultrawide tilting trinocular eyepiece tube (tilt angle 0-30 degrees, erect image); F.O.V.: 25mm; optical path changeover: 2-way (binocular:photo 100:0/0:100).
- Stage:
8 x 8 Stage; stroke: 205 x 205mm; coarse/fine movement changeover possible; fixed-position X-Y fine-movement controls.
- Eyepieces:
CFI eyepiece lens series
- Objectives:
CFI 60 LU/L Plan series
- Weight:
43.75 kg (96.45 lbs) when 8 x 8 stage and L2TT eyepiece tube are used
- Compliance:
SEMI S2-93A, S8-95, CE, UL
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