CFI Infinity Optics
With a 60mm parfocal distance and larger objective diameter, the Nikon's CFI60 optics provide both longer working distances and higher numerical apertures. The results of this remarkable technology are extremely sharp, high contrast images with a minimum of flare.
Flexible Epi-Illuminator for Reflected Light
The Universal Epi-Illuminator with 12V/100W halogen lamp ensures bright images whatever observation technique you use - brightfield, darkfield, Nomarski DIC or qualitative polarizing observations. For applications requiring additional illumination, mercury, xenon and metal halide light source options are also available.
Small Footprint
Nikon has designed these microscopes with the smallest footprint for microscopes in their class. This saves valuable space in the lab or fab. Extremely compact 6 inch (150mm) stages are available as a further space saving measure.
Robust, Flexible Design
Using CAE (Computer Aided Engineering), the microscope body has been made to withstand the weight of a full complement of accessories without any deterioration in image sharpness due to vibration.
ESD (Electro Static Discharge) Design
ESD (Electro Static Discharge) Design -- The L150 features a total ESD design. On the L150 and L150A stands, the elimination of static prevents foreign particles from adhering to the microscope body, providing greater safeguards against contamination. With the L150, all parts that the operator comes in contact with are ESD, making the microscope ideal for the inspection of static sensitive components, such as magnetic heads (GMRs, etc.).
Optional Spacers
The base and arm sections of these microscopes can be separated so that the user can add spacers for the observation of thick samples up to 78mm.
Motorized Nosepiece
The L150A comes standard with a fixed-motorized quintuple nosepiece. Internal software assures that the nosepiece stops precisely at each objective position. Nosepiece controls are located below the stage to prevent contamination, by eliminating the need to place hands in or near the stage area.
SEMI S2-0200/S8-0600 Compliant
All controls are up-front in the microscope base to minimize operator hand movement and the eyepoint is set at the optimum level to ensure comfortable observation. A refocusing mechanism also prevents the objective from hitting the sample.
- Eyepiece tube (F.O.V./observation port: photo port):
Y-TB Binocular Tube B, F.O.V. 22mm; Y-TE Ergonomic Binocular Tube, F.O.V. 22mm, tilting angle 8 degrees - 32 degrees and telescopic mechenism movement + 15mm; Y-TF Trinocular Tube FUW, F.O.V. 22/25mm, 100:0, 0:100, Reticle rotation compensation provided; Y-TT Trinocular Tube TUW, F.O.V. 22/25mm, 100:0, 20:80, 0:100, Reticle roatation compensation provided; L-T12 Trinocular Eyepiece Tube ESD (erect image), F.O.V. 22/25mm, 100:0, 0:100; Y-IER Eyelevel Riser (thickness 25mm), for adjustment of eyelevel (up to 50mm)
- Eyepiece:
L-W10x ESD (F.O.V. 22mm); 10x (F.O.V. 22mm); 10xM photo mask (F.O.V. 22mm); 10x CM crossline (F.O.V. 22mm); 12.5x (F.O.V. 16mm); 15x (F.O.V. 14.5mm); UW 10x (F.O.V. 25mm); 10xM photo mask (F.O.V. 25mm)
- Optical System:
CFI60 (infinity optical system) Parfocal distance : 60mm
- Episcopic Illumination:
Universal Epi-Illuminator ESD with 12V/100W halogen lamp (Light source built-in); (For BF/DF/DIC (option), qualitative polarizing obersvations); Centerable Field Diaphragm, Aperture Diaphragm, (Both are synchronized with B/D changeover); Four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; Optional High Intensity Illuminators available (100W Mercury, 75W Xenon, 150W Metal Halide)
- Nosepiece:
C-N Sextuple Nosepiece; L-NBD5 BD Quintuple Nosepiece ESD; L-NU5 Universal Quintuple Nosepiece ESD; L-NI5A Motorized Universal Quintuple Nosepiece, fixed to L150A Stand
- Objectives:
CFI LU/L Plan series
- Focusing mechanism; Coarse focusing; Fine focusing:
Stroke - 30mm; 12.7mm per rotation (torque adjustable, refocusing mechanism provided; 0.1mm per rotation (in 1um increments)
- Guide:
2-guide
- Stage:
Stage: L-S6 6 x 6 Stage ESD (L150A/L150), Cross travel 150 x 150mm, with ESD plate or 6" wafer holder; 6 x 4 Stage - adapter required, with glass plate Y-SR2 3 x 2 Rectangular Mechanical Stage R2 - adapter required, Cross Travel 78 x 54mm, metal holder optional ; 4 x 4 Stage with Glass Plate - adapter required, Cross travel 100 x 100mm, glass stage, diascopic observation possible; Circular Graduated Stage G - adapter required, Stage diameter: 190mm, rotation 360 degrees, vernier reading
- Intermediate Tube Accessories:
Double Port, Epi-Fluorescence Attachment, Teaching Head
- Dimensions (mm) and Weight:
397(W) x 581(D) x 487(H) (eye-level), 20 kg. (with L-T12, 6 x 6 stage, BD)
- Power Supply:
AC 100-240V 2.4A 50/60Hz ±10%
- L150 ESD SET:
Discharge Time : 100V - 10V Less than 0.2 sec
- Compliance:
SEMI S2-0200/S8-0600, UL, CE
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