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UNITRON - DMM 3000 non-contact measuring microscope

Key FeaturesSpecificationsPrint Download

The DMM3000 Allows Precise, Repeatable and Accurate Depth Measurements Without Physical Contact - Even on Difficult Samples. The DMM3000 utilizes the Vickers Instruments’ patented Precise Focus Indicator (PFI), designed especially for the semiconductor industry.
Other Universal Measuring Microscopes: 
Nikon DMM 3000 from Excel Technologies, Inc. (CLICK TO ENLARGE

Key Features
  • This indicator enables even inexperienced operators to focus accurately on reflectivity surfaces, regardless of any visible structure. Measurement of the Z-axis are achieved by first focusing accurately on the top of the relevant feature to be measured and then refocusing on the bottom. The true point of focus is reached when the two halves of the PFI coincide. The movement in Z-axis in refocusing is the required thickness or depth on the digital readout unit
  • Readout resolution allows for a precision of 1 micron
  • Advantages? Non-contact measurement method prevents any physical damage to delicate samples


Specifications

ITEMS MODELS Monocular with TV C Mount Trinocular
(TV C Mount Type)
DHII-M2 DHII-M3 DHII-M4 DHII-M5 DHII-M6 DHII-T2 DHII-T3 DHII-T4 DHII-T5 DHII-T6
MICROSCOPE
STAND
• Coarse focus control
120mm by rack &
pinion mechanism
• Semi-coarse focus
control measuring
range 25mm
(5.5mm/360° rotation)
by cross roller guide
mechanism
• Fine focus control
0.1mm/360° rotation
• Accommodates
samples 120mm
height
VIEWING HEAD Monocular with
TV C mount tube
Erect
image
Inclination
of head
20°
             
Trinocular
(TV C mount tube)
              
Precise
Focus
Indicator
Black graticule, white stripe
graticule & without graticule,
selectable by switch-over lever
Reflected
Illuminator
Tungsten lamp 8V 15W
transformer built in microscope stand
EYEPIECE NWF10X (G-14 crossline reticle) F.N.16
NWF 10X F.N.16                   
OBJECTIVE PLM10X (W.D.12.0mm)
MEASURING STAGE 505S 50 x 50mm traveler                        
505L 50 x 50mm travel (with T-slots)                   
510 100 x 50mm travel (with T-slots)                   
510D 100 x 50mm travel (with T-slots,
linear scale & X-Y counter)
reading 1µm or 0.5 µm
                                  
100D 100 x 100mm travel
(with rotary table, linear scale & X-Y
counter) reading 1µm ir 0.5 µm
                  
MICROMETERS
(X&Y)
M-50B 50 x 50mm travel
reading 5µm (Mechanical)
               
Z-AXIS DIGITAL
INDICATOR
ID-F125 25mm range, reading 1µm
with BCD output terminal

 


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