Your Nikon microscope dealer and distributor of instruments and software solutions for optical applications.

IMAGING PRODUCTS

• The Confocal Nexiv VMR-H3040ZC combines Confocal high speed height measurement with bright field and laser autofocus for high accuracy automated video measuring.
• Ideal for measuring micro-dimentional 2D and 3D work pieces, all requiring exceptionally high accuracy. Examples: bump heights on advanced IC packages, MEMS, probe card, micro lens, contact lenses, photo spacers for color FPD panel, molds and others.
• 5-step 15x telecentric zoom (15:1) magnification to cover different fields of view and resolution requirements.
• Fast, accurate and durable - 300 X, 400Y mm travel cast Mehanite stage with 150mm Z.
• Precision ground large diameter ballscrew with DC servo motors for high speed and stiffness.
• Advanced Nikon optics provide superior images for improved repeatability and accuracy.
• Confocal objective lenses: 1.5x - W.D. 24mm, 3x - W.D.. 24mm, 7.5x - W.D.. 24mm
• Vision and TTL laser autofocus. High speed through-the-lens laser scans 1000 points/sec. with 0.5 um Z accuracy at 2 sigma.
• Fast, confocal high precision height measurement 0.35 @ 2 sigma in 1.5 sec. cycle time.
• Advanced image processing enhances contrast and fidelity with powerful edge detection to ensure accuracy and repeatability.
• New, easy-to-program, versatile VMR Automeasure software includes: CAD reader, offline programming, profiling software and programming wizards.
• Faster image acquisition and system speed with selected defect-free instrument grade progressive scan black and white CCD camera.

• Stroke (Xx Yy Zz) (Standard):
  300 x 400 x 150 mm (11.8 x 15.8x 5.9) in.
• Minimum readout :
  0.1 microns
• Maximum work piece weight :
  20kg (44.0 lb.)
• Measuring accuracy at 20C+/-0.5K:  U1x U1y:
  1.5 + 4L/1000 microns
• Measuring accuracy at 20C+/-0.5K:  U2xy (Standard):
  2.5 + 4L/1000 microns
• Z-axis guide accuracy :
  (1.5+L/150) microns
• Camera :
  B/W Progressive Scan camera or color CCD camera
• Maximum specimen height (Standard):
  150mm
• Objective 1.5x:
  W.D. 24mm, FOV 8 x 6 mm to 0.53 x 0.4mm, Z measurement @ 2 sigma 0.6 micron
• Objective 3x: W.D. 24mm, FOV 4 x 3 mm to 0.27 x 0.2mm, Z measurement @ 2 sigma 0.35 micron
• Objective 7.5x: W.D. 24mm, FOV 1.6 x 1.2 mm to 0.11 x 0.08mm, Z measurement @ 2 sigma 0.25 micron
• Auto Focus :
  (TTL)Through the lens laser and video auto focus
• Power Source :
  AC 100 to 240 V+/- 10%, 50/60 Hz
• Power Consumption :
  Approximately 13A
• Dimensions & Weight: main body & table:
  1150(W) x 1250(D) x 1980(H) mm, 900kg; 51.1 (W) x 49.2(D) x 80(H) in., 1980 lb
• Dimensions & Weight: controller:
  250(W) x 550(D) x 500(H) mm, 20kg; 9.8(W) x 21.7(D) x 19.7(H) in., 44.1lb
• Footprint:
  2200(W) x 1250(D) mm; 87(W) x 49.2(D) in. estimate of main unit & computer table
• Host Computer: main unit:
  Pentium 4 (Windows(R) 2000/XP)
• Host Computer: monitor:
  19-inch LCD flat panel (standard for USA)
• CE (low voltage/EMC/Laser):