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Nexiv: Video and Vision Based Measuring Instruments
With increased speeds in stage movement, sampling, image processing and system control, the VMR Series performs measurements with dramatically improved throughput with enhanced U2 accuracy.
DC Servo Motor control, 150-mm/sec-stage speed with 3020 and 300 mm/sec with 6555
New Telecentric 15:1 zoom optical system with 0.3 numerical aperture and 25 millimeter working distance
New dual ring programmable oblique LED illuminators, each ring has 8 independent segments
Improved stage accuracy with new design lower coefficient of expansion scales with 0.1-micron resolution
More stringent stage accuracy specifications, all stages are U2 compliant
High accuracy, high speed through the lens Laser with 8-micron spot size. Scans a 1000 points a second and has a 25-millimeter working distance
Faster image acquisition and improved system speed with a progressive scan black and white camera
New separate system controller with all electronics along with halogen episcopic and diascopic illumination built in. This removes heat source and vibration from fan illuminators from main stand.
High-speed local area network connection (LAN) between the system controller and the computer improves program run time along with improved laser and video auto focus performance.
New 300 by 200 millimeter steel stage on VMR-3020 with ball screw design cross roller bearing guides. (Fast, Accurate, Durable)
New VMR Automeasure software includes CAD Reader, Offline Programming, Profiling Software, and Programming Wizards. (All standard)
Improved measuring accuracy with New Patented High Accuracy edge probes developed by Nikon.
Stroke (Xx Yy Zz) (Standard):
650 x 550 x 150 mm (25.6 x 21.7x 5.9) in.
Minimum readout :
0.1µm
Maximum work piece weight :
30kg (66.1lb.)
Measuring accuracy at 20C+/-0.5K :
U1x U1y :
U1x U1y: ''1.5 + 4L/1000 mm Max Work Piece 30kg
U2xy (Standard):
'2.5 + 4L/1000 mm Max Work Piece 30kg
Z-axis guide accuracy :
(1.5+L/150) mm
Camera :
B/W Progressive Scan camera or color CCD camera
Maximum specimen height (Standard):
105mm
Zoom Head Magnification and Field of View :
Type 1: 0.5- 7.5x, 9.33 x 7.00mm - 0.622 x 0.467mm; Type 2: 1- 15x, 4.67 x 3.50mm - 0.311x 0.233mm; Type 3: 2 - 30x, 2.33 x 1.75mm - 0.155 x 0.117mm
Auto Focus :
(TTL) Through the lens laser and video auto focus
Power Source :
AC 100 to 240 V+/- 10%, 50/60 Hz
Power Consumption :
Approximately 9A
Dimensions and Weight :
Main Body Only: 1220(W) x 1680(D) x 1750(H) mm, 600kg; 48.0(W) x 66.1(D) x 68.9(H) in., 1322.8lb
Main Body & Table: 690(W) x 730(D) x 1725(H) mm, 200kg; 27.2(W) x 28.8(D) x 67.9(H) in., 440.9lb
Controller: 250(W) x 550(D) x 500(H) mm, 20kg; 9.8(W) x 21.7(D) x 19. (H) in., 44.1lb
Foot Print: 2400 (W) x 2000 (D) mm; 94.5 (W) x 78.7 (D) in.
Host Computer :
Main unit: IBM PC/AT compatible (Windows® 2000)
CRT: 21-inch color
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